A Noise Spectroscopy-Based Selective Gas Sensing with MOX Gas Sensors

摘要

We propose a new method for obtaining a fluctuation-enhanced sensing (FES) signature of a gas using a single metal oxide (MOX) gas micro sensor. Starting from our model of adsorption-desorption (A-D) noise previously developed, we show theoretically that the product of frequency by the power spectrum density (PSD) of the gas sensing layer resistance fluctuations often has a maximum which is characteristic of the gas. This property was experimentally confirmed in the case of the detection of NO2 and O-3 using a WO3 sensing layer. This method could be useful for classifying gases. Furthermore, our noise measurements confirm our previous model showing that PSD of the A-Dnoise in MOX gas sensor is a combination of Lorentzians having a low frequency magnitude and a cut-off frequency which depends on the nature of the detected gas.