机译:Electrochemical etching of n-type 15R-SiC and 6H-SiC without UV illumination
Nankai Univ, Dept Phys, Tianjin 300071, Peoples R China.;
Nankai Univ, Coll Informat Tech Sci, Tianjin 300071, Peoples R China.;
China Elect Technol Grp Corp, Res Inst 46, Tianjin 300192, Peoples R China.;