机译:Novel etching method on high rate ZnO:Al thin films reactively sputtered from dual tube metallic targets for silicon-based solar cells
Institute of Photovoltaics, Research Centre Jülich, D-52425 Jülich, Germany;
Engineering Research Center for Nanophotonics and Advanced Instrument, Ministry of Education, East China Normal University, 200062 Shanghai, China;
Chemical wet-etching; Silicon thin film solar cells; Surface structure; ZnO:Al films;