New functions of scanning nonlinear dielectric microscopy - higher order measurement and vertical resolution

摘要

Recently, we have proposed and developed the SNDM, which is a new, purely electrical technique for imaging the state of ferroelectric polarization and the local crystal anisotropy of dielectric materials. This time, we investigated the new functions of SNDM, which are measurement of the higher order nonlinear dielectric constant and the vertical resolution of SNDM. It is expected to obtain the higher resolution by the higher order measurement than that by the conventional SNDM imaging. Moreover, using the very high vertical resolution of SNDM, a new microscopy for measuring the microscopic topography and a new displacement sensor for the very small will be available.