IrSi3/phyphen;Si Schottky diodes have been fabricated by a molecular beam epitaxy technique at 630thinsp;deg;C. Good surface morphology was observed for IrSi3layers grown at temperatures below 680thinsp;deg;C, and an increasing tendency to form islands is observed in samples grown at higher temperatures. Good diode currenthyphen;voltage characteristics were observed and Schottky barrier heights of 0.14ndash;0.18 eV were determined by activation energy analysis and spectral response measurement.
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