Application of gratings in fabricating arrays of superconducting and normal junctions

摘要

Here we propose and demonstrate new applications of diffraction gratings, made on photoresists by optical interference of two laser beams, in fabricating onehyphen; and twohyphen;dimensional arrays of superconducting and normal junctions. By depositing metal films on photoresist gratings, it is possible to fabricate uniformly and closely spaced junctions. Junction arrays with submicron dimensions can be much more easily made with this technique than with the presently available techniques. Furthermore, the proposed technique offers the potential capability of producing more than 106junctions per mm2over an area of several cm2.