Crystallinity and hardness of B+hyphen;implanted Fe

摘要

Pure Fe is implanted with B+at a target temperature range of minus;20 to 300thinsp;deg;C. The effects of the target temperature on the crystallinity and hardness in the B+hyphen;implanted Fe are investigated. It was found that Fe2B is formed by using direct B+implantation into pure Fe without subsequent annealing. lsquo;lsquo;Cold implantation,rsquo;rsquo; where the implantation is performed at a lower target temperature, reduces crystallinity and increases the hardness of the B+hyphen;implanted Fe. An increase in target temperature, therefore, renders the B+hyphen;implanted Fe with high crystallinity and relatively low hardness.