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机译:(112^^-0)ZnO膜/石英基板 構造のSH型SAW伝搬特性
同志社大学工学部;
東北大学工学部;
Faculty of Engineering, Doshisha UniversityDepartment of Electrical, and Communication Engineering, Tohoku University;
(112^^-0)面配向ZnO膜; SH型SAW; RFマグネトロンスパッタ法; (112^^-0) textured ZnO film; SH-SAW; RF magnetron sputtering;