Modification of polyimide coatings by high energy ion bombardment

摘要

AbstractExposure of 25‐μm films of polyimide and polyamideimide to high doses (>1015/cm2) of energetic ions (energy ≥ 100 keV) resulted in physical and chemical modification of the film surface. Cross‐section microscopy revealed damaged layers extending beyond the projected ion range; conductivity in this damaged layer was found to be as high as 103ω−1cm−1. Surface conductivity was found to be a function of ion energy and dose, with an exponential energy dependence from 200 to 900 keV. The temperature dependence and thermal stability of the surface conductivity were