AbstractThe pressure of a steady‐state flow of monomer,p0, changes to a new steady‐state flow pressure,pg, in glow discharge. The value ofpgis dependent on the flow rate of monomer, the pumping‐out rate of the vacuum system for the product gas (which is hydrogen in many cases of plasma polymerization of hydrocarbons), and the characteristic hydrogen yield of a monomer associated with plasma polymerization. The relationships between these factors were established and examined for plasma polymerizations of acetylene, ethylene, and acryloni
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