Plasma polymerized membranes and gas permeability. I

摘要

AbstractGas permeability of composite membrane prepared by plasma polymerization of various organic compounds was studied. In the membrane, a pinhole‐free polymeric thin film was formed on a porous substrate. This film below 0.2 μm in thickness had sufficient mechanical strength for gas separation. The composite membranes were recognized to have high permeability and high permselectivity. Especially, the membranes prepared from hexamethyldisiloxane showed high permeation rate for oxygen, and those prepared from 1‐hexene or cyclohexane showed high permselectivity between oxygen and nitrogen. chemical structure of plasma‐polymerized film prepared from hexamethyldisiloxane was similar to that of dimethylpolysiloxane with a crosslinking of the polymer. The high permeability and high permselectivity of this film is considered to be due to its structure as mentioned