PLD-Fabricated Isotropic Pr-Fe-B Film Magnets Deposited on Glass Substrates

摘要

Pr-Fe-B thick-film magnets were deposited on glass substrates without a buffer layer using a pulsed laser deposition method to apply the films to micro-electro-mechanical systems. Large particles with the average diameter of approximately 50 mu m were emitted from a target and enabled us to obtain the relatively high deposition rate of 30 Vm/h. An approximately 100 mu m-thick Pr-Fe-B film with the (BH)(max) value of 70 kJ/m(3) could be obtained. After polishing a Pr-Fe-B thick film deposited on a glass substrate with groove, the magnetic properties of the film did not deteriorate.