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Narrow multi-walled carbon nanotubes produced by chemical vapor deposition using graphene layer encapsulated catalytic metal particles

机译:利用石墨烯层封装催化金属颗粒进行化学气相沉积制备的窄多壁碳纳米管

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摘要

The use of graphene layer encapsulated catalytic metal particles for the growth of narrower multi-walled carbon nanotubes (MWCNTs) has been studied using plasma-enhanced chemical vapor deposition and conventional thermal CVD. Ni-C or Fe-C composite nanoclusters were fabricated using the dc arc discharge technique with metal-graphite composite electrodes carrying a current of 100-200 A in a stainless-steel chamber filled with He and CH4 mixture gas at 27 kPa. Nano-sized grains with diameters less than 10 nm were fabricated and deposited on a Si substrate, and were used as a catalyst for MWCNT growth. Structural analyses of the composite nanoclusters and MWCNTs were carried out using transmission electron microscopy. The results show that the diameters of the MWCNTs were reduced from 50-100 nm for a conventional Ni thin film-evaporated Si substrate to a minimum of roughly 2-4 nm in the present study.
机译:使用等离子体增强化学气相沉积和常规热CVD研究了石墨烯层封装催化金属颗粒在更窄的多壁碳纳米管(MWCNT)生长中的应用。采用直流电弧放电技术制备了镍-碳复合纳米团簇,金属-石墨复合电极在充满氦气和CH4混合气体的不锈钢腔室中以27 kPa的电流承载100-200 A的电流。制备了直径小于10 nm的纳米级晶粒并沉积在Si衬底上,并用作MWCNT生长的催化剂。采用透射电子显微镜对复合纳米团簇和MWCNTs进行了结构分析。结果表明,在本研究中,MWCNTs的直径从常规Ni薄膜蒸发Si衬底的50-100 nm减小到最小约2-4 nm。

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