Ozone formation in oxygen at atmospheric pressure following the photodissociation of O2molecules in the vacuum UV range is tudied. A new VUV source based on incoherent xenon excimer radiation from a dielectric#x2013;barrier discharge provided narrow#x2013;band UV radiation at 172 nm with a half#x2013;width of 14 nm. The formation of ozone from the initial photodissociation fragments O(3P) and O(1D) is treated theoretically and compared to measurements.
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