Changes in the spectral characteristics of quartz-glass plates when they are processed with laser-induced plasma

摘要

This paper presents the results of studies of changes in the transmittance and luminescence spectra of quartz-glass plates caused by surface-processing the plates with laser-induced microplasma. The recorded changes are probably caused by a change in the surface roughness and by the microgeometry of the resulting relief, as well as by possible penetration of the target material into the material being processed. The paper presents the results of studies on removing the changes by using wet laser cleaning, heat treatment in an oven, and chemical processing in a nitric acid solution. It is shown that the changes in the transmission and luminescence spectra can be minimized or entirely eliminated by using wet laser cleaning. (C) 2017 Optical Society of America