Sematech Explores Copper Contamination

摘要

Ken Monnig headed an International SEMATECH (Austin, Texas) team that studied the effects of copper contamination on device performance. The group's findings gave member companies a baseline from which they could develop copper-based manufacturing strategies. Though the study was completed over a year ago, its lessons remain valuable to semiconductor manufacturers, tool and materials suppliers alike, who are continually refining their copper programs. Among other findings, International SEMATECH determined how copper contamination travels through a fab and which process tools should be dedicated to the copper fab area.