A modulation interference microscope has been developed with record-breaking lateral resolution (10-100 nm) and high image-production rate (up to 250 frames per second). The optical layout of the device, the operating principles, and the problems of superhigh optical resolution in phase images are described. Possible ways of developing a method for modulation interference microscopy are discussed, along with areas in which the method can be used to study nanostructured materials, the topology of integrated microcircuits, and the morphology of biological objects.
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