Effective saturable absorber for KrF lasers

摘要

We report what we believe is the first demonstration of an effective and scalable saturable absorber for KrF lasers. Our measurements show that a 10hyphen;cm path length of ozone (O3) at a partial pressure sim;1 Torr will attenuate a flux of less than 50 mJ/cm2by a factor sim;50 (sim;2percnt; transmission), while allowing transmission of sim;90percnt; for energy densities above 1 J/cm2.