Block Copolymer Morphology Formation on Topographically Complex Surfaces: A Self-Consistent Field Theoretical Study

摘要

A self-consistent fi eld theoretic study is performed to study morphological development of lamellae-forming diblock copolymers on substrates with a well-defi ned roughness, modeled as trenches of varying depth and width engraved into the substrates. There are three possible lamellar orientations observed: horizontal lamellae, vertical lamellae that are parallel to the trench direction, and vertical lamellae that are perpendicular to the trench direction. Which of these three morphologies formed depends upon the trench width and surface affi nity; however, trench depth has a relatively insignifi cant effect on the morphological development. Therefore, tuning trench width, but not trench depth, should allow for a reduction of the morphological defect density in directed selfassembly of lamellar morphology of diblock copolymers.