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A low-cost method of obtaining a stable environment for a highly precise displacement-measuring laser interferometer

机译:一种为高精度位移测量激光干涉仪获得稳定环境的低成本方法

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摘要

This paper presents a practical and inexpensive method to achieve nanometer stability in laser interferometric displacement measurements in an actual environment, for example, in a machine shop. The system employed here consists of a vacuum chamber, which maintains mechanical connection between an inside measurement mirror and an outside target, a 6 atm air supply, three air pressure regulators, an air ejector and a 100 litre surge tank. Use of this system reduced the displacement measurement fluctuation from 35 nm peak-to-valley/70 s in a 146.4 mm long dead path in an ordinary environment to 1.2 nm peak-to-valley/70 s (8.2*10-9). The influences of air turbulence and floor vibration were also investigated. The total cost of this system is less than $4000.
机译:本文提出了一种实用且廉价的方法,可以在实际环境中(例如在机加工车间)中实现激光干涉位移测量的纳米稳定性。这里采用的系统包括一个真空室,该真空室在内部测量镜和外部目标之间保持机械连接,一个 6 个大气压的空气供应,三个气压调节器,一个空气喷射器和一个 100 升的调压罐。使用该系统将位移测量波动从普通环境中 146.4 mm 长死程的 35 nm 峰谷/70 秒减少到 1.2 nm 峰谷/70 秒 (8.2*10-9)。还研究了空气湍流和地板振动的影响。该系统的总成本不到 4000 美元。

著录项

  • 来源
    《nanotechnology》 |1995年第1期|24-28|共页
  • 作者

    S Hosoe; S -I Tanaka;

  • 作者单位

    Dept. of Appl. Electron., Sci. Univ. of Tokyo, Japan;

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  • 原文格式 PDF
  • 正文语种 英语
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