首页> 外文期刊>Carbon: An International Journal Sponsored by the American Carbon Society >A large range of boron doping with low compensation ratio for homoepitaxial diamond films
【24h】

A large range of boron doping with low compensation ratio for homoepitaxial diamond films

机译:一种低补偿比的低硼掺杂对同型外延金刚石薄膜的掺杂

获取原文
获取原文并翻译 | 示例
获取外文期刊封面目录资料

摘要

A large range (B from 5-10~16 to 8*10~20 cm~(-3)) of boron concentration has been obtained for homoepitaxial diamond films. From the variation of the conductivity versus temperature between 300 and 1000 K, a simpler method is used to derive the activation energy (ies) E_a and the compensation ratio from the variation of the hole concentration and mobility with temperature. For B<2*10~17 cm~(-3), a saturation of the conductivity is observed between 680 and 1000 K, E_a=E_i (ionisation energy of the boron) ,and compensation ratio around 10 is deduced. Then, up to 10~19cm~(-3), an additional E_a=E_i/2=185 meV is observed between 500 and 1000 K, with compensation ratio<10. At higher B, an additional nearest neighbour hopping contribution to the conduction is obtained from the formation of the boron impurity band. It dominates and gives metallic conductivity when B=3*10~20 cm~(-3).
机译:同延金刚石薄膜的硼浓度范围较大([B]从5-10~16到8*10~20 cm~(-3))。根据300-1000 K之间电导率随温度的变化,使用一种更简单的方法从空穴浓度和迁移率随温度的变化中推导出活化能(ies)E_a和补偿比。对于[B]<2*10~17 cm~(-3),电导率在680-1000 K之间饱和,E_a=E_i(硼的电离能),推导补偿比约为10%。然后,在10~19cm~(-3)以下,在500-1000 K之间观察到额外的E_a=E_i/2=185 meV,补偿比<10%。在较高的[B]处,从硼杂质带的形成中获得对传导的额外最近邻跳跃贡献。当[B]=3*10~20 cm~(-3)时,它占主导地位并赋予金属电导率。

著录项

获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号