机译:钌添加Cu-Zr合金薄膜的性能改进
College of Information and Communication Engineering, Harbin Engineering University, 150001 Harbin, People's Republic of China;
Key Laboratory of Superlight Materials and Surface Technology, Harbin Engineering University, Ministry of Education, 150001 Harbin,;
Sputtering; Thin films; Copper alloys; Interfaces;