Three-mirror interferometer of partially coherent light for monitoring surface relief

摘要

The interference of partially coherent light in a three-mirror interferometer with a low-coherence light source is analyzed. It is shown that a set of coherence layers (polyzonal interference) is formed when the distance between the two mirrors mounted in the interferometer's reference arm is greater than the coherence length. An expression is obtained that describes the interference of partially coherent light in a three-mirror interferometer. The results of calculations, modeling, and experiments are presented. (C) 2017 Optical Society of America