A large-scale 3-D MEMS optical switch, consisting of MEMS two-axis tilt mirror array and free-space optics, is described. The MEMS tilt mirrors that constitute the array are made of single-crystal silicon supported by high-aspect-ratio torsion springs. The collimator arrays are comprised of optical fiber arrays and polymer microlens arrays; the optical fiber arrays consist of optical fibers with micro ferrules aligned in a polymer substrate having an array of precisely-aligned holes. The prototype module with 100ch optical fiber I/O has a low insertion loss of 4.0dB and a switching time of 3 ms.
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