Microfabrication technology using synchrotron radiation (TIEGA)

摘要

A microfabrication technology using synchrotron radiation (SR) direct photo-etching, which is called TIEGA, has been developed. Rapid (100μm/min) and high aspect ratio (>10) micromachining for PTFE (polytetrafluoroethylene, Teflon), which can be hardly accessible for micromachining by conventional methods, has been realized. Microparts made of metals can be also created by electroforming.