A Fresnel zone plate lens, with a nominal outer zone width of 400 Aring;, has been used to image nanostructures with soft xhyphen;ray synchrotron radiation at 45 Aring; wavelength with the Gouml;ttingen xhyphen;ray microscope at BESSY in Berlin. The structures, consisting of gold lines in thin silicon nitride membranes, were selected for tests of spatial resolution and image forming capabilities. Several patterns associated with deep submicron electronic circuits were also imaged, showing clearly resolved features smaller than 0.1 mgr;m. Images of periodic structures, including 600 Aring; lines on 2000 Aring; centers, suggest a spatial resolution approaching the theoretical limit of approximately 500 Aring;.
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