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首页> 外文期刊>電子情報通信学会技術研究報告. 電子デバイス. Electron Devices >Field emission from a film made of palladium particle bound with insulating material
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Field emission from a film made of palladium particle bound with insulating material

机译:Field emission from a film made of palladium particle bound with insulating material

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摘要

We propose a metal fine-particle film as a novel material for use in field electron emitter and demonstrate field emission of electrons from the film. Palladium (Pd) fine-particle films were prepared on silicon substrate using either spin-coat method or squeezing method after mixing Pd particles and spin-on-glass (SOG). It was found that the threshold voltage for electron emission was drastically decreased after aging induced by field-emission current flow of the order of μA. After the aging, emission current fluctuation was as low as less than 10. We also demonstrate the patterning of the Pd particle films using the squeezing method by embedding the particles in holes opened at the silicon surface. Field emission current of the order of μA was obtained from the patterned sample at 700V.

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