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Relationship between dislocation density and nucleation of multicrystalline silicon

机译:位错密度与多晶硅成核的关系

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摘要

Dislocation density and crystal orientation were investigated for a set of multicrystalline silicon ingots grown in a pilot scale furnace. Both low and high dislocation density ingots were observed. The low dislocation density ingots showed a dominating orientation close to (2 1 1) in contrast to the high dislocation density ingots. The orientations are consistent with growth on dendritic crystals formed along the crucible bottom and dendritic crystals with an angle towards the melt, respectively. During crystal growth, the power that was dis?sipated to the crystallization furnace showed a marked drop shortly after the onset of crystallization for low dislocation density ingots, an indication of fast release of crystallization heat from dendritic growth. Ingots that were not dominated by a high dislocation density instead had a high occurrence of twinned areas. Favourable orientation of the 110 vector in the growth plane is suggested to be the cause of growth dominated by multiple twin faceting. This favourable orientation existed for crystals grown from dendrites grown along the crucible bottom, and this is suggested as an explanation for why these crystals are dominated by multiple twins rather than dislocations.
机译:研究了一组在中试规模炉中生长的多晶硅锭的位错密度和晶体取向。观察到低位错密度和高位错密度的铸锭。与高位错密度铸锭相比,低位错密度铸锭表现出接近(2 1 1)的主导取向。取向分别与沿坩埚底部形成的树枝状晶体和与熔体成一定角度的树枝状晶体上的生长一致。在晶体生长过程中,低位错密度铸锭在结晶开始后不久,耗散到结晶炉的功率明显下降,这表明树枝状生长会快速释放结晶热。不以高位错密度为主的铸锭反而具有较高的孪晶区发生率。[110]向量在生长平面中的有利方向被认为是由多个孪生面主导的生长的原因。这种有利的取向存在于沿着坩埚底部生长的树突中生长的晶体中,这被认为是解释为什么这些晶体由多个孪生而不是位错主导的解释。

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