机译:Effects of Fluorine Implantation on 1/f Noise, Hot Carrier and NBTI Reliability of MOSFETs
Dept. of Electronics Engineering, Chungnam National Univ., Daejeon 305-764, Korea;
Magnachip Semiconductor Inc., Hungduk-gu, Cheongju, Choongbuk, 361-725, Korea;
fluorine; flicker noise; 1/f noise; reliability; hot-carrier; NBTI; MOSFET;