Electromigration failure in NiCr thinhyphen;film stripes

摘要

Electromigrationhyphen;induced failure in NiCr thinhyphen;film stripes is investigated. The composition of evaporated NiCr thin films is 77:23 Nisol;Cr in weight percnt;, according to a spectroscopic analysis. The mean time to failure (MTF) of NiCr thinhyphen;film stripes can be qualitatively expressed by a relation similar to that held in the MTF of Al thinhyphen;film stripes, i.e., MTF prop;Jminus;nexp(jgr;sol;kT). However, the values ofnand jgr; of NiCr are 13 and 1.14 eV, respectively, whereas those of Al are 2 inverted lazy s 3 and 0.41 eV, respectively.