机译:Analytical characterization of thin carbon films
IBM Deutschland Speichersysteme GmbH, Hechtsheimer Str. 2, 55131 Mainz, Germany;
Fraunhofer Institut fur Schicht-und Oberflachentechnik, Bienroder Weg 54E, 38108 Braunschweig, Germany;
thickness determination; carbon overcoat; x-ray reflectivity (XRR); thin-film analysis; areal storage density;