Design and Simulation of FBAR for Quality Factor Enhancement

摘要

Thin film bulk acoustic resonator (FBAR) higher quality factor (Q) provides steep skirt and low insertion losses in the pass band. In this paper, three different loss sources are identified and FBAR is design and simulated in order to reduce the losses. Firstly, the FBAR's top electrode is simulated for the areas of 150 x 150, 300 x 300 and 400 9 400 mu m(2) and the quality factor is improved as the area increased to 102, 432.6 and 743.7 respectively. The impedance of the FBAR is reduced as the area of the electrode is increased. Secondly, the anchor width is reduced from 60 to 45 mu m and the quality factor is increased from 341 to 432.6 respectively. The losses through the anchor reduce as the anchor reduces. Electrode area and anchor area simulation are showing the notable effect and no other paper is reported for the comparison. Thirdly, the damping factor coefficient (beta) is varied as 4.7e(-14), 3.84e(-14) and 2.5e(-14). The quality factor is increased as the damping factor reduces and reported as 283.2, 341.2 and 444.5 respectively. The damping reduction leads the FBAR structure to vibrate more freely at the resonance. The losses through damping are reduced and more energy has stored at the resonance so it increases the quality factor.