Gas molecule adsorption characteristics of a sensing film on Quartz Crystal Microbalance gas sensor were tried to make to the numerical value by analyzing the time series data of the sensor response. Gas molecule adsorption process to the sensing film was modeled based on the Langmuir adsorption theory, and an equation expressed the process was led. Curve fit between the obtained equation and measured actual sensor response was done by the least square method. It was shown to be able to express the sensor response by the equation, enough. And, the parameters obtained as a result of the analysis become the numerical value which showed the gas molecule adsorption characteristic of the sensing film.
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