UV laser deposition of SiS/poly(thiacarbosilane) composites and their conversion to SiO/poly(thiacarbosiloxane) composites

摘要

ArF laser irradiation of gaseous mixtures of carbon disulfide and silane allows efficient deposition of Si-S bond-containing poly(thiacarbosilanes) incorporating SiS bodies. These SiS/poly(thiacarbosilane) composites are the first example of silicon sulfide/polymer composites. Composite formation is analyzed by GC/MS analysis of volatile products and the structure of the composite as determined by electron microscopy and FT-IR spectra. The composites undergo reaction with air moisture and methanol vapor, evolve H2S and evolve to nano-sized poly(thiacarbosiloxane)s and poly(methoxythiacarbosiloxane)s.