Auger electron spectroscopy and microscopy with probehyphen;size limited resolution

摘要

High spatial resolution Auger electron spectra and images have been obtained by optimizing secondary electron collection efficiency in a scanning transmission electron microscope (STEM). We describe an ultrahigh vacuum, 100 keV STEM which is capable of collecting Auger electron spectra and images with edge resolutions of le;5 nm. Typical spectra and images from the Ge/Si(100) and Ag/Si(100) film growth systems are presented and discussed. These images demonstrate highhyphen;resolution elemental mapping which can be used in the study of surface processes on the nanometer scale.