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机译:Tera Tool terahertz time-domain spectroscopy
Dept. of Phys., Rensselaer Polytech. Inst., Troy, NY, USA;
time-domain analysis; submillimetre wave spectroscopy; insulating thin films; polymer films; internal stresses; dielectric thin films; integrated circuit measurement; terahertz differential time-domain spectroscopic method; parylene-n; polymer film;