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机译:Design and fabrication of compositionally graded inorganic oxide thin films: Mechanical, optical and permeation characteristics
Samsung Advanced Institute of Technology, Yongin, Gyeonggi 446-712, Republic of Korea;
Laboratoire de Technologie des Composites et Polymeres (LTC), Ecole Polytechnique Federale de Lausanne (EPFL), Station 12,CH-1015 Lausanne, Switzerland;
Department of Mechanical Engineering, College of Engineering, Kyung Hee University, Yongin, Gyeonggi 446-701, Republic of Korea;
Functionally graded materials; Thin films; Interface structure; Sputtering; Toughness;