机译:Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures
Information Technology R&D Center Mitsubishi Electric Corp., Kamakura-shi, 247-8501 Japan;
Advanced Technology R&D Center Mitsubishi Electric Corp., Amagasaki-shi, 661-8661 Japan;
micromachine; MEMS; hollow waveguides; GCPW; filters; hybrids; MEMS switches; silicon;