机译:高密度反应性等离子体中非晶态SiC基体中嵌入硅量子点的单步快速低温合成
Plasma Nanoscience Centre Australia (PNCA), CSIRO Materials Science and Engineering, PO Box 218, Lindfield, NSW2070, Australia;
Plasma Sources and Applications Centre, NIE, Nanyang Technological University, 1 Nanyang Walk 637616, Singapore;
Chemical vapor deposition; Quantum dots; Inductively coupled plasmas; Solar cells;