Depth profiles for hydrogen in amorphous silicon have been determined by the use of resonant nuclear reactions lsqb;1H(15N,agr;ggr;)12C and1H(19F,agr;ggr;)16Orsqb; and by secondary ion mass spectroscopy (SIMS). Independent calibration procedures were used for the two techniques. Measurements were made on the same amorphous silicon film to provide a direct comparison of the two hydrogen analysis techniques. The hydrogen concentration in the bulk of the film was determined to be about 9 at.percnt; H. The SIMS results agree with the resonant nuclear reaction results to within 10percnt;, which demonstrates that quantitative hydrogen depth profiles can be obtained by SIMS analysis for materials such as amorphous silicon.
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