机译:Effect of Cu Vacancy on Cu3Si(001) Surface for the Synthesis of SiHCl3 by Hydrogenation of SiCl4:A DFT Study
Shihezi Univ;
Tianjin Univ;
Silicon tetrachloride; Hydrochlorination; Trichlorosilane; Cu-vacancy; Chlorosilane; GENERALIZED GRADIENT APPROXIMATION; SILICON TETRACHLORIDE; ROCHOW REACTION; DIFFUSION; MECHANISM; COPPER;