机译:Subsurface damage pattern and formation mechanism of monocrystalline beta-Ga2O3 in grinding process
Dalian Univ Technol;
monocrystalline beta-phase gallium oxide; grinding process; subsurface damage; nanocrystals; amorphous phase; STACKING-FAULT ENERGY; DEFORMATION MECHANISM; MATERIAL REMOVAL; SINGLE-CRYSTALS; WEAR;