A 2D photonic crystal indium arsenide based with dual micro-cavities coupled to a waveguide as a platform for a high sensitivity pressure sensor

摘要

In the present work, we give a hydrostatic pressure sensor based on two micro-cavities coupled to a photonic crystals waveguide. A dual asymmetric H-1 incorporing each one a point defect is introduced to create a sharp resonance output spectrum response of the structure. These defects make it able to detect the change of the Indium arsenide (InAs) substrate refractive index with the applied pressure changes. By applying a hydrostatic pressure on the active surface of the sensor, the refractive index of the InAs changes consequently. Therefore, this change induces a shift of the output resonant wavelength, which constitute the basis of the detection mechanism used by the photonic crystals pressure sensor. This proposed structure gives a high refractive index and pressure sensitivity reaching respectively 421 nm/RIU and 26.1 nm/GPa for a wide pressure range. Therefore, it provides very distinctive resonance peaks with good quality factors for all considered refractive index and a perfect linear relationship between the cutoff wavelength and the pressure, which offer a possibility of highly selective pressure detection.