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机译:Reduction of helium permeation in microfabricated cells using aluminosilicate glass substrates and Al2O3 coatings
FEMTO-ST Institute, Université de Franche-Comté, CNRS;
Department of Physics and Mathematics, University of Eastern Finland;
IEMN UMR 8520, Université Lille, CNRS, Centrale Lille, Université Polytechnique Hauts-de-France;