Determining the parameters of optical thin films by a spectrophotometric method

摘要

This paper proposes a procedure for determining file refractive index and thickness of thin transparent films. based oil an approximation of the experimental spectral dependence of the reflectance by file Cubic spline function and a computation of the first two derivatives. The errors that arise when the parameters of films of various thicknesses are computed are analyzed. It is shown that the technique call be reliably used when processing the results of spectrophotometric measurements of optical films more than 150-200 Angstrom thick. (C) 2004 Optical Society of America.