Design of InP-based membrane waveguide on Si substrate toward low propagation loss and high-efficiency coupling with laser

摘要

In this report, structure dependence of characteristics of membrane waveguides were investigated. The comparison of the characteristics gives a 1-2 dB/cm propagation loss with deep etched rib waveguide. And in the meanwhile, the bent radius can be smaller than 6μm. Also, liber to waveguide and laser to waveguide coupling efficiency were calculated. 8.8 dB improvement and over 97 high coupling can be achieved for fiber-to-waveguide spot size convertor (SSC) and laser-to-waveguide SSC, respectively.