机译:Low temperature deposition of Ga_2O_3 films on sapphire and epi-GaN substrates
Xidian Univ, Sch Microelect, State Key Discipline Lab Wide Band Gap Semicond T, Xian 710071, Peoples R China|Xidian Univ, Sch Microelect, Shaanxi Joint Key Lab Graphene, Xian 710071, Peoples R China;