The Effect of Pulse Duration on the Structure and Mechanical, Tribotechnical, and Optical Characteristics of Zr-B-N Coatings Obtained by the PMS Method

摘要

The effect of the duration of the reverse pulse (0.4, 0.7, and 1.1 mu s) at pulsed magnetron sputtering at a frequency of 350 kHz on the structure and properties of optically transparent Zr-B-N coatings has been studied. The chemical composition, morphology, optical transmission coefficient, adhesive strength, hardness, elasticity modulus, elastic recovery, crack resistance, friction coefficient, wear, erosion, and abrasive resistance of coatings, along with their resistance to cyclic impact loading, have been determined. It has been established that the best set of characteristics is achieved at 0.7 mu s.