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机译:First-principles study of oxygen vacancy defects in orthorhombic Hf0.5Zr0.5O2/SiO2/Si gate stack
School of Electrical Engineering and Automation, Institute of Technological Sciences, Wuhan University;
Key Laboratory of Microelectronics and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences;
Beijing Superstring Academy of Memory TechnologySchool of Integrated Circuits, Tsinghua UniversityFaculty of Information Technology, School of Microelectronics, Beijing University of TechnologySchool of Physics and Electronic Information, Weifang University;