Thermomechanical Effects of Radiation Origin in Microelectronic Products

摘要

Abstract A mathematical model of the thermomechanical effect of penetrating radiation on a microelectronic product is presented. The model is based on the thermoelasticity equations, which are a consequence of the quantum kinetic equations for phonons. Heat transfer is described by the law of conservation of energy and the Cattaneo equation, which takes into account the finiteness of the rate of heat propagation. Lattice vibrations are considered in the approximation of the linear theory of elasticity. In general, the model determines the distribution of temperature, energy flow, strain, and stress. Difference schemes for solving model equations are developed. The efficiency of the developed model is verified by solving the problem of thermal shock.